Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in

dc.contributor.author	Brijs, Bert
dc.contributor.author	Deleu, Jeroen
dc.contributor.author	Storm, Wolfgang
dc.contributor.author	De Coster, Walter
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.accessioned	2021-09-29T14:18:05Z
dc.date.available	2021-09-29T14:18:05Z
dc.date.embargo	9999-12-31
dc.date.issued	1996
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1105
dc.source.beginpage	541
dc.source.endpage	546
dc.source.journal	Nuclear Instruments and Methods in Physics Research B
dc.source.volume	118
dc.title	Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in
dc.type	Journal article
dspace.entity.type	Publication
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