Publication:
Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/water process
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2071 since deposited on 2021-10-16
17last month
4last week
Acq. date: 2026-09-17
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Statistics
Views
2071 since deposited on 2021-10-16
17last month
4last week
Acq. date: 2026-09-17
Citations