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Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/water process
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2040 since deposited on 2021-10-16
5last month
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Acq. date: 2026-04-25
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Statistics
Views
2040 since deposited on 2021-10-16
5last month
2last week
Acq. date: 2026-04-25
Citations