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Impact of direct plasma hydrogenation on thermal donor formation in N-type CZ silicon

dc.contributor.authorRafi, Joan Marc
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorHuang, Y.L.
dc.contributor.authorUlyashin, A.G.
dc.contributor.authorJob, R.
dc.contributor.authorVersluys, J.
dc.contributor.authorClauws, P
dc.contributor.authorLozano, M.
dc.contributor.authorCampabadal, F.
dc.date.accessioned2021-10-16T04:21:47Z
dc.date.available2021-10-16T04:21:47Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11074
dc.sourceIIOimport
dc.titleImpact of direct plasma hydrogenation on thermal donor formation in N-type CZ silicon
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpageG16
dc.source.endpageG24
dc.source.journalJournal of the Electrochemical Society
dc.source.issue1
dc.source.volume152
imec.availabilityPublished - imec


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