Impact of direct plasma hydrogenation on thermal donor formation in N-type CZ silicon

Metadata

Show full item record

Authors

Rafi, Joan Marc; Simoen, Eddy; Claeys, Cor; Huang, Y.L.; Ulyashin, A.G.; Job, R.; Versluys, J.; Clauws, P; Lozano, M.; Campabadal, F.

Issue

1

Journal

Journal of the Electrochemical Society

Volume

152

Title

Impact of direct plasma hydrogenation on thermal donor formation in N-type CZ silicon

Publication type

Journal article

Collections

Articles