Publication:
Impact of direct plasma hydrogenation on thermal donor formation in N-type CZ silicon
Date
| dc.contributor.author | Rafi, Joan Marc | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Huang, Y.L. | |
| dc.contributor.author | Ulyashin, A.G. | |
| dc.contributor.author | Job, R. | |
| dc.contributor.author | Versluys, J. | |
| dc.contributor.author | Clauws, P | |
| dc.contributor.author | Lozano, M. | |
| dc.contributor.author | Campabadal, F. | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-16T04:21:47Z | |
| dc.date.available | 2021-10-16T04:21:47Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11074 | |
| dc.source.beginpage | G16 | |
| dc.source.endpage | G24 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of the Electrochemical Society | |
| dc.source.volume | 152 | |
| dc.title | Impact of direct plasma hydrogenation on thermal donor formation in N-type CZ silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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