Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography

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Authors
Roelkens, Gunther; Dumon, Pieter; Bogaerts, Wim; Van Thourhout, Dries; Baets, Roel
Issue
12
Journal
IEEE Photonics Technology Letters
Volume
17
Title
Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography
Publication type
Journal article
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