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Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography

dc.contributor.authorRoelkens, Gunther
dc.contributor.authorDumon, Pieter
dc.contributor.authorBogaerts, Wim
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-16T04:34:04Z
dc.date.available2021-10-16T04:34:04Z
dc.date.issued2005-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11113
dc.sourceIIOimport
dc.titleEfficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography
dc.typeJournal article
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.beginpage2613
dc.source.endpage2615
dc.source.journalIEEE Photonics Technology Letters
dc.source.issue12
dc.source.volume17
imec.availabilityPublished - imec


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