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Compact and high-accuracy RF MEMS capacitive series devices

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T04:40:46Z
dc.date.available2021-10-16T04:40:46Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11135
dc.sourceIIOimport
dc.titleCompact and high-accuracy RF MEMS capacitive series devices
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage55
dc.source.endpage65
dc.source.conferenceMEMS/MOEMS Components and Their Applications II
dc.source.conferencedate24/01/2005
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 5717


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