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Model for the voltage and charge actuations of deformable clamped-clamped beams in presence of dielectric charging

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorYeatman, Eric M.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T04:41:25Z
dc.date.available2021-10-16T04:41:25Z
dc.date.issued2005-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11137
dc.sourceIIOimport
dc.titleModel for the voltage and charge actuations of deformable clamped-clamped beams in presence of dielectric charging
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.source.peerreviewno
dc.source.beginpage172
dc.source.endpage175
dc.source.conferenceProceedings of the 16th MicroMechanics Europe Workshop - MME
dc.source.conferencedate4/09/2005
dc.source.conferencelocationGöteborg Sweden
imec.availabilityPublished - imec


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