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Specific features of the capacitance and mobility behaviors in FinFET structures

dc.contributor.authorRudenko, Tamara
dc.contributor.authorKilchytska, Valeria
dc.contributor.authorCollaert, Nadine
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorRooyackers, Rita
dc.contributor.authorJurczak, Gosia
dc.contributor.authorFlandre, Denis
dc.date.accessioned2021-10-16T04:42:44Z
dc.date.available2021-10-16T04:42:44Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11141
dc.sourceIIOimport
dc.titleSpecific features of the capacitance and mobility behaviors in FinFET structures
dc.typeProceedings paper
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage85
dc.source.endpage88
dc.source.conferenceProceedings of the 35th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate12/09/2005
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec


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