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Nano imprint lithography for photonic structure patterning

dc.contributor.authorScheerlinck, S.
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-16T04:52:40Z
dc.date.available2021-10-16T04:52:40Z
dc.date.issued2005-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11171
dc.sourceIIOimport
dc.titleNano imprint lithography for photonic structure patterning
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.beginpage63
dc.source.endpage66
dc.source.conferenceSymposium IEEE/LEOS Benelux Chapter
dc.source.conferencedate1/12/2005
dc.source.conferencelocationMons Belgium
imec.availabilityPublished - imec
imec.internalnotesISBN 2-9600226-4-5


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