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Piezoelectric scavengers in MEMS technology: fabrication and simulation

dc.contributor.authorSchmitz, Andreas
dc.contributor.authorSterken, Tom
dc.contributor.authorRenaud, Michael
dc.contributor.authorFiorini, Paolo
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-16T04:53:36Z
dc.date.available2021-10-16T04:53:36Z
dc.date.issued2005-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11174
dc.sourceIIOimport
dc.titlePiezoelectric scavengers in MEMS technology: fabrication and simulation
dc.typeProceedings paper
dc.contributor.imecauthorSterken, Tom
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewno
dc.source.beginpage61
dc.source.endpage64
dc.source.conferenceTechnical Digest PowerMEMS. 5th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Application
dc.source.conferencedate28/11/2005
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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