dc.contributor.author | Schram, Tom | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Lujan, Guilherme | |
dc.contributor.author | Deweerd, Wim | |
dc.contributor.author | Chen, Jerry | |
dc.contributor.author | Tsai, Wilman | |
dc.contributor.author | Henson, Kirklen | |
dc.contributor.author | Lander, Rob | |
dc.contributor.author | Hooker, Jacob | |
dc.contributor.author | Vertommen, Johan | |
dc.contributor.author | De Meyer, Kristin | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-16T04:55:40Z | |
dc.date.available | 2021-10-16T04:55:40Z | |
dc.date.issued | 2005-03 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11180 | |
dc.source | IIOimport | |
dc.title | Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors | |
dc.type | Journal article | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | no | |
dc.source.beginpage | 779 | |
dc.source.endpage | 782 | |
dc.source.journal | Microelectronics Reliability | |
dc.source.issue | 5_6 | |
dc.source.volume | 45 | |
imec.availability | Published - imec | |