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Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors
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Authors
Schram, Tom
;
Ragnarsson, Lars-Ake
;
Lujan, Guilherme
;
Deweerd, Wim
;
Chen, Jerry
;
Tsai, Wilman
;
Henson, Kirklen
;
Lander, Rob
;
Hooker, Jacob
;
Vertommen, Johan
;
De Meyer, Kristin
;
De Gendt, Stefan
;
Heyns, Marc
Issue
5_6
Journal
Microelectronics Reliability
Volume
45
Title
Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors
Publication type
Journal article
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