Publication:

Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors

Date

2005-03
Journal article
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Author(s)

Schram, Tom  
;
Ragnarsson, Lars-Ake  
;
Lujan, Guilherme
;
Deweerd, Wim
;
Chen, Jerry
;
Tsai, Wilman
;
Henson, Kirklen
;
Lander, Rob
;
Hooker, Jacob
;
Vertommen, Johan
;
De Meyer, Kristin  
;
De Gendt, Stefan  
;
Heyns, Marc  

Journal

Microelectronics Reliability

Abstract

Description

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