Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors

Schram, Tom; Ragnarsson, Lars-Ake; Lujan, Guilherme; Deweerd, Wim; Chen, Jerry; Tsai, Wilman; Henson, Kirklen; Lander, Rob; Hooker, Jacob; Vertommen, Johan; De Meyer, Kristin; De Gendt, Stefan; Heyns, Marc

Publication:

Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors

Date

2005-03

Journal article

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

;

;

;

;

;

;

;

;

Journal

Microelectronics Reliability

Statistics

1907 since deposited on 2021-10-16

1last month

Acq. date: 2026-02-24

Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors

Date

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations