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Influence of TaN microstructure on its etch properties

dc.contributor.authorShamiryan, Denis
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBoullart, Werner
dc.date.accessioned2021-10-16T05:00:19Z
dc.date.available2021-10-16T05:00:19Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11194
dc.sourceIIOimport
dc.titleInfluence of TaN microstructure on its etch properties
dc.typeMeeting abstract
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.source.peerreviewno
dc.source.beginpage563
dc.source.conferenceMeeting Abstracts 208th Electrochemical Society Meeting
dc.source.conferencedate16/10/2005
dc.source.conferencelocationLos Angeles, CA USA
imec.availabilityPublished - imec


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