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Process requirements for increased functionality of silicon technologies

dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-09-29T14:19:00Z
dc.date.available2021-09-29T14:19:00Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1119
dc.sourceIIOimport
dc.titleProcess requirements for increased functionality of silicon technologies
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageT24
dc.source.endpageT30
dc.source.conferenceProceedings Segunda Workshop Iberchip
dc.source.conferencedate12/02/1996
dc.source.conferencelocationSao Paulo Brazil
imec.availabilityPublished - open access


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