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Electrical and opical characterization of thin semiconductor layers for advanced ULSI devices

dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorGaubas, E.
dc.contributor.authorRafi, J.M.
dc.date.accessioned2021-10-16T05:03:29Z
dc.date.available2021-10-16T05:03:29Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11204
dc.sourceIIOimport
dc.titleElectrical and opical characterization of thin semiconductor layers for advanced ULSI devices
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage539
dc.source.endpage546
dc.source.conferenceGettering and Defect Engineering in Semiconductor Technology XI. Proceedings of the 11th International Autumn Meeting
dc.source.conferencedate25/09/2005
dc.source.conferencelocationGiens France
imec.availabilityPublished - imec


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