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Defect removal, dopant diffusion and activation issues in ion-implanted shallow junctions fabricated in crystalline germanium substrates
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1985 since deposited on 2021-10-16
3last month
Acq. date: 2025-12-08
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Metrics
Views
1985 since deposited on 2021-10-16
3last month
Acq. date: 2025-12-08
Citations