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Metal deposition on Ge surfaces

dc.contributor.authorSioncke, Sonja
dc.contributor.authorOnsia, Bart
dc.contributor.authorStruys, K.
dc.contributor.authorRip, Jens
dc.contributor.authorVos, Rita
dc.contributor.authorMeuris, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorTheuwis, A.
dc.date.accessioned2021-10-16T05:08:09Z
dc.date.available2021-10-16T05:08:09Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11217
dc.sourceIIOimport
dc.titleMetal deposition on Ge surfaces
dc.typeProceedings paper
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorRip, Jens
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewno
dc.source.beginpage220
dc.source.endpage227
dc.source.conferenceCleaning Technology in Semiconductor Device Manufacturing IX
dc.source.conferencedate16/10/2005
dc.source.conferencelocationLos Angeles, CA USA
imec.availabilityPublished - imec
imec.internalnotesECS Transactions; Vol.1, nr.3


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