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Technological challenges for silicon technologies

dc.contributor.authorClaeys, Cor
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-09-29T14:19:08Z
dc.date.available2021-09-29T14:19:08Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1121
dc.sourceIIOimport
dc.titleTechnological challenges for silicon technologies
dc.typeProceedings paper
dc.contributor.imecauthorDeferm, Ludo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage73
dc.source.endpage90
dc.source.conferenceJoint 24th International Conference on Microelectronics, MIEL'96 and 32nd Symposium on Devices and Materials, SD'96. Proceedings
dc.source.conferencedate25/09/1996
dc.source.conferencelocationNova Gorica Slovenia
imec.availabilityPublished - open access


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