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Trends and challenges for advanced silicon technologies

dc.contributor.authorClaeys, Cor
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-09-29T14:19:12Z
dc.date.available2021-09-29T14:19:12Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1122
dc.sourceIIOimport
dc.titleTrends and challenges for advanced silicon technologies
dc.typeProceedings paper
dc.contributor.imecauthorDeferm, Ludo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1
dc.source.endpage16
dc.source.conferenceProceedings of the 6th Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology - GADEST'95
dc.source.conferencedate2/09/1995
dc.source.conferencelocationBerlin Germany
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena; Vols.47-48


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