Authors

Soussan, Philippe; O'Donnell, Kathy; D'Haen, Jan; Vanhoyland, Geert; Beyne, Eric; Tilmans, Harrie

Conference

Materials, Integration and Packaging Issues for High-Frequency Devices II

Title

Pulsed DC sputtered aluminum nitride: a novel approach to control stress and C-axis orientation

Publication type

Proceedings paper

Embargo date

9999-12-31