Process- and irradiation-induced defects in silicon devices
dc.contributor.author | Claeys, Cor | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Vanhellemont, Jan | |
dc.date.accessioned | 2021-09-29T14:19:25Z | |
dc.date.available | 2021-09-29T14:19:25Z | |
dc.date.issued | 1996 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1125 | |
dc.source | IIOimport | |
dc.title | Process- and irradiation-induced defects in silicon devices | |
dc.type | Journal article | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 244 | |
dc.source.endpage | 257 | |
dc.source.journal | Nuclear Instruments and Methods in Physics Research A | |
dc.source.volume | 377 | |
imec.availability | Published - open access |