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Effect of nitridation on l/f noise in n-MOSFETs with high-k dielectric

dc.contributor.authorSrinivasan, Purushothaman
dc.contributor.authorSimoen, Eddy
dc.contributor.authorPantisano, Luigi
dc.contributor.authorClaeys, Cor
dc.contributor.authorMisra, D.
dc.date.accessioned2021-10-16T05:23:15Z
dc.date.available2021-10-16T05:23:15Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11264
dc.sourceIIOimport
dc.titleEffect of nitridation on l/f noise in n-MOSFETs with high-k dielectric
dc.typeMeeting abstract
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage568
dc.source.conferenceMeeting Abstracts 208th Meeting of the Electrochemical Society
dc.source.conferencedate16/10/2005
dc.source.conferencelocationLos Angeles, CA USA
imec.availabilityPublished - imec
imec.internalnotes3th Int. Symp. on High Dielectric Constant Materials: Materials Science, Processing, Reliability and Manufacturing Issues


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