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Review on process induced defects in high resistivity silicon

dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVanhellemont, Jan
dc.date.accessioned2021-09-29T14:19:29Z
dc.date.available2021-09-29T14:19:29Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1126
dc.sourceIIOimport
dc.titleReview on process induced defects in high resistivity silicon
dc.typeMeeting abstract
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage471
dc.source.conferenceElectrochemical Society 190th Fall Meeting: Symposium on High Purity Silicon IV
dc.source.conferencedate6/10/1996
dc.source.conferencelocationSan Antonio, TX USA
imec.availabilityPublished - open access
imec.internalnotesMeeting Abstracts; Vol. 96-2


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