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Resist rework on metal hardmask in a Low-plasma damage patterning approach
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Authors
Struyf, Herbert
;
Hendrickx, Dirk
;
Mannaert, Geert
;
Boullart, Werner
;
Vanhaelemeersch, Serge
Conference
Proceedings 27th Dry Process Symposium
Title
Resist rework on metal hardmask in a Low-plasma damage patterning approach
Publication type
Proceedings paper
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