Resist rework on metal hardmask in a Low-plasma damage patterning approach

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Authors
Struyf, Herbert; Hendrickx, Dirk; Mannaert, Geert; Boullart, Werner; Vanhaelemeersch, Serge
Conference
Proceedings 27th Dry Process Symposium
Title
Resist rework on metal hardmask in a Low-plasma damage patterning approach
Publication type
Proceedings paper
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