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Test structures and methodologies for assessments of back-end-of line (BEOL) reliability

dc.contributor.authorTokei, Zsolt
dc.contributor.authorBruynseraede, Christophe
dc.date.accessioned2021-10-16T05:44:31Z
dc.date.available2021-10-16T05:44:31Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11324
dc.sourceIIOimport
dc.titleTest structures and methodologies for assessments of back-end-of line (BEOL) reliability
dc.typeOral presentation
dc.contributor.imecauthorTokei, Zsolt
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Microelectronic Test Structures - ICMTS
dc.source.conferencedate4/04/2005
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec
imec.internalnotesShort Course; presentation


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