Publication:
Deep lithography with protons to prototype pluggable micro-optical out-of-plane coupling structures for multimode waveguides
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1933 since deposited on 2021-10-16
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Acq. date: 2026-02-25
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1933 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-02-25
Citations