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Role of C and B clusters in transient diffusion of B in silicon

dc.contributor.authorCowern, Nick
dc.contributor.authorCacciato, A.
dc.contributor.authorCuster, J. S.
dc.contributor.authorSaris, F. W.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T14:20:30Z
dc.date.available2021-09-29T14:20:30Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1139
dc.sourceIIOimport
dc.titleRole of C and B clusters in transient diffusion of B in silicon
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1150
dc.source.endpage1152
dc.source.journalApplied Physics Letters
dc.source.issue8
dc.source.volume68
imec.availabilityPublished - open access


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