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Role of C and B clusters in transient diffusion of B in silicon
Publication:
Role of C and B clusters in transient diffusion of B in silicon
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Date
1996
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Cowern, Nick
;
Cacciato, A.
;
Custer, J. S.
;
Saris, F. W.
;
Vandervorst, Wilfried
Journal
Applied Physics Letters
Abstract
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2013
since deposited on 2021-09-29
3
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
2013
since deposited on 2021-09-29
3
last month
Acq. date: 2025-12-10
Citations