Publication:

Role of C and B clusters in transient diffusion of B in silicon

Date

1996
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorCowern, Nick
dc.contributor.authorCacciato, A.
dc.contributor.authorCuster, J. S.
dc.contributor.authorSaris, F. W.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-29T14:20:30Z
dc.date.available2021-09-29T14:20:30Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1139
dc.source.beginpage1150
dc.source.endpage1152
dc.source.issue8
dc.source.journalApplied Physics Letters
dc.source.volume68
dc.title

Role of C and B clusters in transient diffusion of B in silicon

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
1115.pdf
Size:
406.76 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles