The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules
| dc.contributor.author | De Keersmaecker, Roger | |
| dc.contributor.author | Declerck, Gilbert | |
| dc.contributor.author | Félix, P. | |
| dc.contributor.author | Haond, M. | |
| dc.contributor.author | Hill, C. | |
| dc.contributor.author | Janssen, G. | |
| dc.contributor.author | Lorenz, J. | |
| dc.contributor.author | Maes, Herman | |
| dc.contributor.author | Montree, Andre | |
| dc.contributor.author | Neppl, F. | |
| dc.contributor.author | Patruno, P. | |
| dc.contributor.author | Rudan, M. | |
| dc.contributor.author | Ryssel, H. | |
| dc.contributor.author | Van den hove, Luc | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | van Ommen, A. | |
| dc.date.accessioned | 2021-09-29T12:40:35Z | |
| dc.date.available | 2021-09-29T12:40:35Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/113 | |
| dc.source | IIOimport | |
| dc.title | The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | De Keersmaecker, Roger | |
| dc.contributor.imecauthor | Declerck, Gilbert | |
| dc.contributor.imecauthor | Van den hove, Luc | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 2852 | |
| dc.source.endpage | 2859 | |
| dc.source.journal | J. Vac. Sci. Technol. B | |
| dc.source.issue | 4 | |
| dc.source.volume | 12 | |
| imec.availability | Published - imec |
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