Authors

De Keersmaecker, Roger; Declerck, Gilbert; Félix, P.; Haond, M.; Hill, C.; Janssen, G.; Lorenz, J.; Maes, Herman; Montree, Andre; Neppl, F.; Patruno, P.; Rudan, M.; Ryssel, H.; Van den hove, Luc; Vandervorst, Wilfried; van Ommen, A.

Issue

4

Journal

J. Vac. Sci. Technol. B

Volume

12

Title

The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

Publication type

Journal article