The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

De Keersmaecker, Roger; Declerck, Gilbert; Félix, P.; Haond, M.; Hill, C.; Janssen, G.; Lorenz, J.; Maes, Herman; Montree, Andre; Neppl, F.; Patruno, P.; Rudan, M.; Ryssel, H.; Van den hove, Luc; Vandervorst, Wilfried; van Ommen, A.

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The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

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1994

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De Keersmaecker, Roger

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Vandervorst, Wilfried

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van Ommen, A.

Journal

J. Vac. Sci. Technol. B

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The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

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