The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

De Keersmaecker, Roger; Declerck, Gilbert; Félix, P.; Haond, M.; Hill, C.; Janssen, G.; Lorenz, J.; Maes, Herman; Montree, Andre; Neppl, F.; Patruno, P.; Rudan, M.; Ryssel, H.; Van den hove, Luc; Vandervorst, Wilfried; van Ommen, A.

Publication:

The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

Date

1994

Journal article

Simple item page Full metadata Statistics

Author(s)

De Keersmaecker, Roger

;

;

;

;

;

;

;

;

;

;

;

;

;

;

Vandervorst, Wilfried

;

van Ommen, A.

Journal

J. Vac. Sci. Technol. B

Statistics

2085 since deposited on 2021-09-29

1last month

Acq. date: 2026-01-26

The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

Date

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations