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The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules
Publication:
The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules
Date
1994
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Keersmaecker, Roger
;
Declerck, Gilbert
;
Félix, P.
;
Haond, M.
;
Hill, C.
;
Janssen, G.
;
Lorenz, J.
;
Maes, Herman
;
Montree, Andre
;
Neppl, F.
;
Patruno, P.
;
Rudan, M.
;
Ryssel, H.
;
Van den hove, Luc
;
Vandervorst, Wilfried
;
van Ommen, A.
Journal
J. Vac. Sci. Technol. B
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2080
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
2080
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations