Publication:

The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

Date

1994
Journal article
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dc.contributor.authorDe Keersmaecker, Roger
dc.contributor.authorDeclerck, Gilbert
dc.contributor.authorFélix, P.
dc.contributor.authorHaond, M.
dc.contributor.authorHill, C.
dc.contributor.authorJanssen, G.
dc.contributor.authorLorenz, J.
dc.contributor.authorMaes, Herman
dc.contributor.authorMontree, Andre
dc.contributor.authorNeppl, F.
dc.contributor.authorPatruno, P.
dc.contributor.authorRudan, M.
dc.contributor.authorRyssel, H.
dc.contributor.authorVan den hove, Luc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan Ommen, A.
dc.contributor.imecauthorDe Keersmaecker, Roger
dc.contributor.imecauthorDeclerck, Gilbert
dc.contributor.imecauthorVan den hove, Luc
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:40:35Z
dc.date.available2021-09-29T12:40:35Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/113
dc.source.beginpage2852
dc.source.endpage2859
dc.source.issue4
dc.source.journalJ. Vac. Sci. Technol. B
dc.source.volume12
dc.title

The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

dc.typeJournal article
dspace.entity.typePublication
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