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Evaluation of Nb(Si)N as metal gate material

dc.contributor.authorVan Hoornick, Nausikaa
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorWitters, Thomas
dc.contributor.authorZhao, Chao
dc.contributor.authorConard, Thierry
dc.contributor.authorHuatori, H.
dc.contributor.authorSwerts, Johan
dc.contributor.authorSchram, Tom
dc.contributor.authorMaes, Jan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-16T06:11:51Z
dc.date.available2021-10-16T06:11:51Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11401
dc.sourceIIOimport
dc.titleEvaluation of Nb(Si)N as metal gate material
dc.typeMeeting abstract
dc.contributor.imecauthorVan Hoornick, Nausikaa
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceMeeting Abstracts 208th Electrochemical Society Meeting
dc.source.conferencedate16/10/2005
dc.source.conferencelocationLos Angeles, CA USA
imec.availabilityPublished - imec
imec.internalnotesAbstract 0553


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