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Dopant/carrier profiling for sub-45 nm semiconductor technologies

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T06:32:46Z
dc.date.available2021-10-16T06:32:46Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11461
dc.sourceIIOimport
dc.titleDopant/carrier profiling for sub-45 nm semiconductor technologies
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferencePhysical and Electrical Characterization of Materials and Devices for Silicon Nanoelectronics
dc.source.conferencedate11/06/2005
dc.source.conferencelocationAutrans Frankrijk
imec.availabilityPublished - imec


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