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Scanning spreading resistance microscopy: sub-nm resolution carrier profiling with high sensitivity in advanced devices

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T06:33:05Z
dc.date.available2021-10-16T06:33:05Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11462
dc.sourceIIOimport
dc.titleScanning spreading resistance microscopy: sub-nm resolution carrier profiling with high sensitivity in advanced devices
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceWorkshop on Scanning Probe Microscopy
dc.source.conferencedate9/11/2005
dc.source.conferencelocationVillach Austria
imec.availabilityPublished - imec


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