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Metrology for sub-45nm and nanotechnology

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T06:33:23Z
dc.date.available2021-10-16T06:33:23Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11463
dc.sourceIIOimport
dc.titleMetrology for sub-45nm and nanotechnology
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceTSMC
dc.source.conferencedate17/01/2005
dc.source.conferencelocationTaiwan
imec.availabilityPublished - imec


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