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Basics, properties and limitations of SIMS in nanometer scale semiconductor technologies

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T06:33:41Z
dc.date.available2021-10-16T06:33:41Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11464
dc.sourceIIOimport
dc.titleBasics, properties and limitations of SIMS in nanometer scale semiconductor technologies
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceForschungszentrum Rossendorf
dc.source.conferencedate3/11/2005
dc.source.conferencelocationRossendorf Germany
imec.availabilityPublished - imec


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