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Limits and applications of SIMS in nanoscale technologies

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJanssens, Tom
dc.contributor.authorGeenen, Luc
dc.contributor.authorConard, Thierry
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorChen, Ping
dc.date.accessioned2021-10-16T06:34:48Z
dc.date.available2021-10-16T06:34:48Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11467
dc.sourceIIOimport
dc.titleLimits and applications of SIMS in nanoscale technologies
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.conferenceSurface Analysis workshop
dc.source.conferencedate4/10/2005
dc.source.conferencelocationCatania Italy
imec.availabilityPublished - imec


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