dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Janssens, Tom | |
dc.contributor.author | Geenen, Luc | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Huyghebaert, Cedric | |
dc.contributor.author | Chen, Ping | |
dc.date.accessioned | 2021-10-16T06:34:48Z | |
dc.date.available | 2021-10-16T06:34:48Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11467 | |
dc.source | IIOimport | |
dc.title | Limits and applications of SIMS in nanoscale technologies | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Huyghebaert, Cedric | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
dc.source.peerreview | no | |
dc.source.conference | Surface Analysis workshop | |
dc.source.conferencedate | 4/10/2005 | |
dc.source.conferencelocation | Catania Italy | |
imec.availability | Published - imec | |