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Super secondary grain growth in the barrier/seedlayer system

dc.contributor.authorVanstreels, Kris
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorDemuynck, Steven
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T06:39:23Z
dc.date.available2021-10-16T06:39:23Z
dc.date.issued2005-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11480
dc.sourceIIOimport
dc.titleSuper secondary grain growth in the barrier/seedlayer system
dc.typeProceedings paper
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Ceuninck, Ward
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage327
dc.source.endpage331
dc.source.conferenceAdvanced Metallization Conference 2004
dc.source.conferencedate19/10/2004
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access
imec.internalnotesConference Proceedings AMC XX


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