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A new method for the lifetime determination of submicron metal interconnects by means of a parallel test structure
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Authors
Vanstreels, Kris
;
D'Olieslaeger, Marc
;
De Ceuninck, Ward
;
D'Haen, Jan
;
Maex, Karen
Issue
3_4
Journal
Microelectronics Reliability
Volume
45
Title
A new method for the lifetime determination of submicron metal interconnects by means of a parallel test structure
Publication type
Journal article
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