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Preparation and characterization of rare earth scandates as alternative gate oxide materials

dc.contributor.authorWagner, M.
dc.contributor.authorHeeg, T.
dc.contributor.authorSchubert, J.
dc.contributor.authorZhao, Chao
dc.contributor.authorRichard, Olivier
dc.contributor.authorCaymax, Matty
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorMantl, S.
dc.date.accessioned2021-10-16T06:59:33Z
dc.date.available2021-10-16T06:59:33Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11534
dc.sourceIIOimport
dc.titlePreparation and characterization of rare earth scandates as alternative gate oxide materials
dc.typeProceedings paper
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.conference6th European Conference on Ultimate Integration of Silicon - ULIS
dc.source.conferencedate7/04/2005
dc.source.conferencelocationBologna Italy
imec.availabilityPublished - imec


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