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The use of functionally graded poly-SiGe layers for MEMS applications

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorMehta, Anshu
dc.date.accessioned2021-10-16T07:12:50Z
dc.date.available2021-10-16T07:12:50Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11567
dc.sourceIIOimport
dc.titleThe use of functionally graded poly-SiGe layers for MEMS applications
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage255
dc.source.endpage260
dc.source.conferenceFunctionally Graded Materials VIII
dc.source.conferencedate11/07/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec
imec.internalnotesMaterials Science Forum. Vols. 492-493


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