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Scaling of ferroelectric memory below the 100nm node: possible routes and challenges

dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-16T07:13:58Z
dc.date.available2021-10-16T07:13:58Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11570
dc.sourceIIOimport
dc.titleScaling of ferroelectric memory below the 100nm node: possible routes and challenges
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceNanoelectronics Days
dc.source.conferencedate9/02/2005
dc.source.conferencelocationJülich Germany
imec.availabilityPublished - imec


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