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Integration and scaling challenges of 3D SBT FeCAP's

dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-16T07:14:17Z
dc.date.available2021-10-16T07:14:17Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11571
dc.sourceIIOimport
dc.titleIntegration and scaling challenges of 3D SBT FeCAP's
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference17th International Symposium on Integrated Ferroelectrics
dc.source.conferencedate17/04/2005
dc.source.conferencelocationShanghai China
imec.availabilityPublished - imec


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