Show simple item record

Measurement of nanoparticles on silicon wafer surface using haze signal by light scattering

dc.contributor.authorXu, Kaidong
dc.contributor.authorVos, Rita
dc.contributor.authorVereecke, Guy
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorKraus, H.
dc.contributor.authorMertens, Paul
dc.contributor.authorVinckier, Chris
dc.contributor.authorKovacs, F.
dc.date.accessioned2021-10-16T07:17:05Z
dc.date.available2021-10-16T07:17:05Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11578
dc.sourceIIOimport
dc.titleMeasurement of nanoparticles on silicon wafer surface using haze signal by light scattering
dc.typeProceedings paper
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.conferenceEuropean Aerosol Conference - EAC European Aerosol Conference 2005 (EAC2005) European Aerosol Conference 2005
dc.source.conferencedate28/08/2005
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record