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In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials

dc.contributor.authorDe Coster, Walter
dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T14:22:09Z
dc.date.available2021-09-29T14:22:09Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1157
dc.sourceIIOimport
dc.titleIn situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage82
dc.source.endpage87
dc.source.journalNuclear Instruments and Methods in Physics Research B
dc.source.volume118
imec.availabilityPublished - open access
imec.internalnotesPaper from the 12th International Conference on Ion Beam Analysis. May 1995. Tempe, AZ, SA.


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